Funding for this research was provided by:
National Natural Science Foundation of China (51205226)
Science Fund for Creative Research Groups (51321092)
Article Title: Erratum: Galvanic corrosion inhibitors for Cu/Ru couple during chemical mechanical polishing of Ru [ ECS J. Solid-State Sci. Technol., 7 , P62 (2017)]
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2020 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2020-04-30
Date Accepted:
Online publication date: 2020-05-11