Xu, Aoxue https://orcid.org/0000-0001-9180-1230
Feng, Daohuan https://orcid.org/0000-0003-3942-0216
Wang, Weilei
Liu, Weili
Song, Zhitang
Funding for this research was provided by:
the National Key Research and Development Program of China (2018YFB0407500)
Article Title: High Removal Rate Cobalt Slurry with Glutathione on Chemical Mechanical Polishing in Alkaline Slurry
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2020 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2020-07-30
Date Accepted:
Online publication date: 2020-09-10