Xu, Aoxue https://orcid.org/0000-0001-9180-1230
Feng, Daohuan https://orcid.org/0000-0003-3942-0216
Wang, Weilei
Liu, Weili
Song, Zhitang
Funding for this research was provided by:
the National Key Research and Development Program of China (2018YFB0407500)
Article Title: High Removal Rate Cobalt Slurry with Glutathione on Chemical Mechanical Polishing in Alkaline Slurry
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2020 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited
Publication dates
Date Received: 2020-07-30
Date Accepted:
Online publication date: 2020-09-10