Kim, Juhwan https://orcid.org/0000-0003-2810-6141
Hong, Seokjun
Kim, Eungchul
Lee, Jaewon
Kwak, Donggeon
Wada, Yutaka
Hiyama, Hirokuni
Hamada, Satomi
Kim, Taesung https://orcid.org/0000-0001-6280-7668
Journal title: ECS Journal of Solid State Science and Technology
Article type: paper
Article title: Effect of Viscosity on Ceria Abrasive Removal during the Buff Clean Process
Copyright information: © 2020 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited
Publication dates
Date received: 2020-08-18
Online publication date: 2020-09-28