Kim, Juhwan https://orcid.org/0000-0003-2810-6141
Hong, Seokjun
Kim, Eungchul
Lee, Jaewon
Kwak, Donggeon
Wada, Yutaka
Hiyama, Hirokuni
Hamada, Satomi
Kim, Taesung https://orcid.org/0000-0001-6280-7668
Article Title: Effect of Viscosity on Ceria Abrasive Removal during the Buff Clean Process
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2020 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2020-08-18
Date Accepted:
Online publication date: 2020-09-28