Pedersen, Henrik https://orcid.org/0000-0002-7171-5383
Ojamäe, Lars https://orcid.org/0000-0002-5341-2637
Danielsson, Örjan https://orcid.org/0000-0001-8116-9980
Funding for this research was provided by:
Vetenskapsrådet
Knut och Alice Wallenbergs Stiftelse (Isotopic Control for Ultimate Material Properties)
Advanced Functional Materials center (AFM) at Linköping University
Swedish National Infrastructure for Computing
Stiftelsen för Strategisk Forskning (SiC - the Material for Energy-Saving Power Electronics)
Article Title: Perspective—Current Understanding of the Halogenated Deposition Chemistry for Chemical Vapor Deposition of SiC
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2020 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2020-06-17
Date Accepted:
Online publication date: 2020-10-15