Pedersen, Henrik https://orcid.org/0000-0002-7171-5383
Ojamäe, Lars https://orcid.org/0000-0002-5341-2637
Danielsson, Örjan https://orcid.org/0000-0001-8116-9980
Funding for this research was provided by:
Vetenskapsrådet
Knut och Alice Wallenbergs Stiftelse (Isotopic Control for Ultimate Mater)
Advanced Functional Materials center (AFM) at Linköping University
Swedish National Infrastructure for Computing
Stiftelsen för Strategisk Forskning (SiC - the Material for Energy-Savin)
Journal title: ECS Journal of Solid State Science and Technology
Article type: comm
Article title: Perspective—Current Understanding of the Halogenated Deposition Chemistry for Chemical Vapor Deposition of SiC
Copyright information: © 2020 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited
Publication dates
Date received: 2020-06-17
Online publication date: 2020-10-15