Philipossian, Ara
Sampurno, Yasa https://orcid.org/0000-0003-3716-5047
Tustin, Michael
Schranner, Anton
Article Title: Tribological, Thermal, Kinetic, and Pad Micro-Textural Studies Using Polyphenylene Sulfide Retaining Rings in Interlayer Dielectric Chemical Mechanical Planarization
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2020 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2020-10-01
Date Accepted:
Online publication date: 2020-12-14