Matsumoto, Tetsuyuki https://orcid.org/0000-0001-8826-0912
Kataoka, Junji
Saito, Reiko https://orcid.org/0000-0002-5334-8102
Homma, Tetsuya
Article Title: Recycling SiC Focus Rings for Reactive Ion Etching Equipment by Insertless Diffusion Bonding using Hot Isostatic Pressing
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2020 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2020-11-17
Date Accepted:
Online publication date: 2020-12-21