Fang, Jau-Shiung https://orcid.org/0000-0003-2355-9176
Yang, Tzu-Ming
Cheng, Yi-Lung https://orcid.org/0000-0002-2788-6601
Chen, Giin-Shan https://orcid.org/0000-0003-0382-610X
Funding for this research was provided by:
Ministry of Science and Technology, Taiwan (MOST 107-2221-E-150-002-MY2)
Article Title: (3-Aminopropyl)trimethoxysilane Self-Assembled Monolayer as Barrier of Porous SiOCH for Electroless Cu Metallization: Optimizations of SiOCH Hydroxylation and Monolayer Functionalization
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2021 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2020-10-22
Date Accepted:
Online publication date: 2021-02-05