Fang, Jau-Shiung https://orcid.org/0000-0003-2355-9176
Yang, Tzu-Ming
Cheng, Yi-Lung https://orcid.org/0000-0002-2788-6601
Chen, Giin-Shan https://orcid.org/0000-0003-0382-610X
Funding for this research was provided by:
Ministry of Science and Technology, Taiwan (MOST 107-2221-E-150-002-MY2)
Article Title: (3-Aminopropyl)trimethoxysilane Self-Assembled Monolayer as Barrier of Porous SiOCH for Electroless Cu Metallization: Optimizations of SiOCH Hydroxylation and Monolayer Functionalization
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2021 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited
Publication dates
Date Received: 2020-10-22
Date Accepted:
Online publication date: 2021-02-05