Lee, Jaewon
Park, Sang-Hyeon
Hong, Seokjun
Seo, Hyeonmin
Liu, Pengzhan
Kim, Eungchul
Kim, Taesung https://orcid.org/0000-0001-6280-7668
Article Title: Communication—A Novel Method to Improve Cleaning Performance by Removing Small Particles in CMP Slurry
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2021 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2020-11-27
Date Accepted:
Online publication date: 2021-02-10