Wang, Chenwei http://orcid.org/0000-0002-2978-3526
Wang, Chao http://orcid.org/0000-0002-9071-022X
Li, Hongliang
Zhou, Jianwei http://orcid.org/0000-0002-2033-8864
Zhang, Xue http://orcid.org/0000-0001-7069-9441
Tian, Yuan http://orcid.org/0000-0003-2744-750X
Xu, Chen
Funding for this research was provided by:
major National Science and Technology Special Projects (No. 2016ZX02301003-004-007)
Article Title: Effect of UV Radiation on Oxidation for Ru CMP
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2021 The Author(s). Published on behalf of The Electrochemical Society by IOP Publishing Limited
Publication dates
Date Received: 2020-09-22
Date Accepted:
Online publication date: 2021-03-10