Article Title: Effect of Diethanolamine as Corrosion Inhibitor for the Chemical Mechanical Polishing of Cobalt in H2O2 Based Slurry
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2021 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited
Publication dates
Date Received: 2020-12-06
Date Accepted:
Online publication date: 2021-04-23