Murota, Junichi https://orcid.org/0000-0001-9493-1962
Ishii, Hiromu https://orcid.org/0000-0002-4787-4237
Article Title: Langmuir-Type Expressions for In-Situ Co-Doping of C with B or P in Si1–xGex Epitaxial Growth by Chemical Vapor Deposition
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2021 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited
Publication dates
Date Received: 2021-05-04
Date Accepted:
Online publication date: 2021-06-14