Ryu, Heon-Yul
Teugels, Lieve
Devriendt, Katia
Struyf, Herbert
Kim, Tae-Gon
Park, Jin-Goo https://orcid.org/0000-0002-8008-6478
Funding for this research was provided by:
Korea Institute for Advancement of Technology (Fostering Global Talents for Innovative Growth Pro)
Article Title: Effects of H 2 O 2 and pH on the Chemical Mechanical Planarization of Molybdenum
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2021 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2021-06-29
Date Accepted:
Online publication date: 2021-09-24