Ni, Zifeng
Zhang, Ping https://orcid.org/0000-0003-1417-4426
Chen, Guomei
Wang, Yongguang https://orcid.org/0000-0001-7686-7899
Qian, Shanhua
Bian, Da
Zhao, Yongwu
Funding for this research was provided by:
Natural Science Research Project of Colleges and Universities in Jiangsu Province, China (19KJB460023)
the Qinglan Project of Colleges and University in Jiangsu Province, China (in 2021)
Graduate Research innovation Plan of Jiangsu Province (KYCX20-1926)
National Natural Science Foundation of China (51305166)
Article Title: An Innovative Movement Mode of Friction and Wear Tester Worktable and Its Application in CMP
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2021 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2021-04-27
Date Accepted:
Online publication date: 2021-10-08