Akbar, Wazir https://orcid.org/0000-0002-7298-0576
Ertunç, Özgür
Article Title: A Coupled Material Removal Model for Chemical Mechanical Polishing Processes
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2021 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2021-07-29
Date Accepted:
Online publication date: 2021-10-28