Cheng, Yi-Lung https://orcid.org/0000-0002-2788-6601
Lin, Yu-Lu
Peng, Wei-Fan
Lee, Chih-Yen
Lin, Yow-Jon
Article Title: Electrical Characteristics and Reliability of SiCN/Porous SiOCH Stacked Dielectric: Effects of Deposition Temperature of SiCN Film
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2021 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2021-06-07
Date Accepted:
Online publication date: 2021-12-03