Cheng, Yi-Lung https://orcid.org/0000-0002-2788-6601
Lin, Yu-Lu
Peng, Wei-Fan
Lee, Chih-Yen
Lin, Yow-Jon
Article Title: Electrical Characteristics and Reliability of SiCN/Porous SiOCH Stacked Dielectric: Effects of Deposition Temperature of SiCN Film
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2021 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited
Publication dates
Date Received: 2021-06-07
Date Accepted:
Online publication date: 2021-12-03