Seo, Min https://orcid.org/0000-0002-9403-4919
Cho, Min Kyung
Kang, Un Hyeon
Jeon, Sin Young
Lim, Sang-Ho
Han, Seung Hee https://orcid.org/0000-0002-8733-5537
Funding for this research was provided by:
Korea Institute of Science and Technology (2E31231)
Article Title: Low-Resistivity Cobalt and Ruthenium Ultra-Thin Film Deposition Using Bipolar HiPIMS Technique
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2022 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2022-01-26
Date Accepted:
Online publication date: 2022-03-04