Seo, Min https://orcid.org/0000-0002-9403-4919
Cho, Min Kyung
Kang, Un Hyeon
Jeon, Sin Young
Lim, Sang-Ho
Han, Seung Hee https://orcid.org/0000-0002-8733-5537
Funding for this research was provided by:
Korea Institute of Science and Technology (2E31231)
Article Title: Low-Resistivity Cobalt and Ruthenium Ultra-Thin Film Deposition Using Bipolar HiPIMS Technique
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2022 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited
Publication dates
Date Received: 2022-01-26
Date Accepted:
Online publication date: 2022-03-04