Funding for this research was provided by:
Hundred Talents Plan, Hebei Province (E2013100006)
Article Title: Study on Electrochemical Corrosion and CMP of GaN in Different Oxidation Systems
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2022 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2021-08-29
Date Accepted:
Online publication date: 2022-03-07