Funding for this research was provided by:
Hundred Talents Plan, Hebei Province (E2013100006)
Article Title: Study on Electrochemical Corrosion and CMP of GaN in Different Oxidation Systems
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2022 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited
Publication dates
Date Received: 2021-08-29
Date Accepted:
Online publication date: 2022-03-07