Wang, Yazhen https://orcid.org/0000-0002-0921-7500
Zhang, Shihao
Tan, Baimei https://orcid.org/0000-0003-3498-4143
Li, Wei
Ji, Jinbo
Yan, Mei
Cui, Zihan
Funding for this research was provided by:
Natural Science Foundation of Hebei Province, China (No. F2018202174)
National Natural Science Foundation, China (No. 61704046)
Major National Science and Technology Special Projects (No. 2016ZX02301003-004-007)
Article Title: Effect of Corrosion Inhibitor BTA on Silica Particles and their Adsorption on Copper Surface in Copper Interconnection CMP
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2022 The Author(s). Published on behalf of The Electrochemical Society by IOP Publishing Limited
Publication dates
Date Received: 2021-12-22
Date Accepted:
Online publication date: 2022-04-11