Jang, Hyo Jun
Kim, Jae Young
Jung, Eun Young
Choi, Muhan
Tae, Heung-Sik https://orcid.org/0000-0002-4261-7581
Funding for this research was provided by:
National Research Foundation of Korea (2020R1I1A3071693)
Article Title: Photoresist Removal Using Reactive Oxygen Species Produced by an Atmospheric Pressure Plasma Reactor
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2022 The Author(s). Published on behalf of The Electrochemical Society by IOP Publishing Limited
Publication dates
Date Received: 2022-02-21
Date Accepted:
Online publication date: 2022-04-14