Zheng, Qingping https://orcid.org/0000-0001-7760-6084
Wang, Ru
Wu, Tongxi https://orcid.org/0000-0003-4956-6366
Liu, Bin
Wang, Shuai
Funding for this research was provided by:
the Major National Science and Technology Special Projects (No. 2016ZX02301003-004-007)
Article Title: Effect of Ammonium Citrates as an Auxiliary Complexing Agent in TSV Copper Film CMP
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2022 The Author(s). Published on behalf of The Electrochemical Society by IOP Publishing Limited
Publication dates
Date Received: 2021-10-28
Date Accepted:
Online publication date: 2022-05-17