Funding for this research was provided by:
National Natural Science Foundation of China (51975488)
Fundamental Research Funds for the Central Universities (2682021CG011)
National Key R&D Program of China (2018YFB2000400)
Beijing Key Laboratory of Long-life Technology of Precise Rotation and Transmission Mechanisms (BZ0388201902)
Article Title: Improving Chemical Mechanical Polishing Efficiency of PZT with Less than 100 ppm SO4 2−
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2022 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited
Publication dates
Date Received: 2022-06-17
Date Accepted:
Online publication date: 2022-09-05