Funding for this research was provided by:
National Natural Science Foundation of China (51975488)
Fundamental Research Funds for the Central Universities (2682021CG011)
National Key R&D Program of China (2018YFB2000400)
Beijing Key Laboratory of Long-life Technology of Precise Rotation and Transmission Mechanisms (BZ0388201902)
Article Title: Improving Chemical Mechanical Polishing Efficiency of PZT with Less than 100 ppm SO 4 2−
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2022 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2022-06-17
Date Accepted:
Online publication date: 2022-09-05