Chiang, Chao-Ching https://orcid.org/0000-0002-0447-8170
Xia, Xinyi
Li, Jian-Sian
Ren, Fan
Pearton, S. J. https://orcid.org/0000-0001-6498-1256
Funding for this research was provided by:
Division of Materials Research (DMR 1856662)
Defense Threat Reduction Agency (HDTRA1-20-2-0002)
Article Title: Selective Wet and Dry Etching of NiO over β -Ga 2 O 3
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2022 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2022-06-10
Date Accepted:
Online publication date: 2022-10-07