Ma, Huiping
Zhou, Jianwei https://orcid.org/0000-0002-2033-8864
Wang, Chenwei
Zhang, Yue
Li, Zihao
Zhang, Xinying
Liu, Guangyao
Funding for this research was provided by:
Major National Science and Technology Special Projects (2016ZX02301003-004-007)
Natural Science Foundation of Hebei Province (E2019202367)
National Natural Science Foundation of China (No.62074049)
Article Title: Role of Diethylene Triaminepentaacetic Acid Pentapotassium Salt on Ruthenium CMP in H2O2-Based Slurries
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2022 The Author(s). Published on behalf of The Electrochemical Society by IOP Publishing Limited
Publication dates
Date Received: 2022-06-22
Date Accepted:
Online publication date: 2022-12-21