Feng, Guang-Huan
Li, Cheng-Ying
Chen, Yueh-Han
Ho, Yi-Chen
Chu, Sheng-Yuan https://orcid.org/0000-0003-2195-7613
Tsai, Cheng-Che
Hong, Cheng-Shong
Article Title: Investigation of Mo Doping Effects on the Properties of AlN-Based Piezoelectric Films Using a Sputtering Technique
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
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Publication dates
Date Received: 2022-08-21
Date Accepted:
Online publication date: 2022-12-12