Song, Qi https://orcid.org/0000-0002-4391-3016
Zhang, Zhe
Xu, Ziye
Wen, Zhidong
Shi, Haiyan
Zhang, Kunpeng
Li, Man
Zhang, Zichen
Hou, Yu
Song, Zhengxun
Article Title: Investigation on the Processing Quality of Nanosecond Laser Stealth Dicing for 4H-SiC Wafer
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2023 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2022-12-18
Date Accepted:
Online publication date: 2023-03-29