Chen, Yu-Lin https://orcid.org/0000-0003-3803-8082
Yeh, Wen-Kuan
Hsu, Heng-Tung
Chen, Ke-Horng
Lin, Wen-Chin
Yu, Tien-Han
Chou, Hung-Ting
Godwin Raj, D
Godfrey, D
Funding for this research was provided by:
MOST- Taiwan (108-2923-E-492 -002 -MY3 and 108-2221-E-492 -029 -)
Article Title: Hot Carrier Injection Reliability of Fabricated N- and P-Type Multi FinFETs with Different TiN Stacks
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2023 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2023-02-13
Date Accepted:
Online publication date: 2023-03-14