Funding for this research was provided by:
Youth Innovation Promotion Association of the Chinese Academy of Science (Y201926)
Article Title: Research on Interface Properties of Thermally Grown SiO2 and ALD SiO2 Stacked Structures
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2023 The Author(s). Published on behalf of The Electrochemical Society by IOP Publishing Limited
Publication dates
Date Received: 2023-02-08
Date Accepted: 2023-05-01
Online publication date: 2023-05-17