Cheng, Yi-Lung https://orcid.org/0000-0002-2788-6601
Lee, Chih-Yen
Chen, Giin-Shan https://orcid.org/0000-0003-0382-610X
Fang, Jau-Shiung https://orcid.org/0000-0003-2355-9176
Funding for this research was provided by:
National Science Council of the Republic of China, Taiwan (MOST-109-2221-E-260-010-MY2)
Article Title: Comparison of Precursors for Self-Assembled Monolayers as Cu Barriers
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2023 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited
Publication dates
Date Received: 2023-03-09
Date Accepted:
Online publication date: 2023-06-06