Cheng, Yi-Lung https://orcid.org/0000-0002-2788-6601
Lee, Chih-Yen
Chen, Giin-Shan https://orcid.org/0000-0003-0382-610X
Fang, Jau-Shiung https://orcid.org/0000-0003-2355-9176
Funding for this research was provided by:
National Science Council of the Republic of China, Taiwan (MOST-109-2221-E-260-010-MY2)
Article Title: Comparison of Precursors for Self-Assembled Monolayers as Cu Barriers
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2023 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2023-03-09
Date Accepted:
Online publication date: 2023-06-06