Tian, Jili https://orcid.org/0009-0001-3099-7476
Meng, Xianghua
Liu, Yang
Cui, Jie
Li, Min
Fan, Kaiguo
Zhang, Qi
Zhang, Huayu
Funding for this research was provided by:
National Natural Science Foundation of China (52202213)
Natural Science Foundation of Shandong Province (ZR2021QE210)
Article Title: Controllable Fabrication of Silicon Nanopore Arrays by Two-Step Inductively Coupled Plasma Etching Using Self-Assembled Anodic Aluminum Oxide Mask
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2023 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2023-02-26
Date Accepted:
Online publication date: 2023-06-22