Chen, Guomei
Xu, Yiceng
Ni, Zifeng https://orcid.org/0000-0001-5974-7713
Bai, Yawen
Fan, Qiang
Chen, Zongyu
Article Title: Effects of Surfactants on the Chemical Mechanical Polishing Performance of a-Plane Sapphire Substrates
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2023 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2023-02-05
Date Accepted:
Online publication date: 2023-09-07