Funding for this research was provided by:
National Natural Science Foundation of China (No. 61704046)
major National Science and Technology Special Projects (No.2016ZX02301003–004–007)
Natural Science Foundation of Hebei Province (No. F2022202072)
Article Title: Synergistic Effect of Complexing Agent TAD and Corrosion Inhibitor PZ on BTA Removal in Copper Post-CMP Cleaning
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2023 The Author(s). Published on behalf of The Electrochemical Society by IOP Publishing Limited
Publication dates
Date Received: 2023-03-06
Date Accepted:
Online publication date: 2023-08-25