Zhou, Yan
Luo, Haimei
Chen, Gaopan
Luo, Guihai
Pan, Liyan
Pan, Guoshun https://orcid.org/0000-0002-6776-2531
Funding for this research was provided by:
Shenzhen Basic Research Program (No. 2021Szvup095)
Article Title: Photocatalysis-Assisted Chemical Mechanical Polishing of SiC Wafer using a Novel SiO2@TiO2 Core-Shell Composite Nanoparticles Slurry
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2023 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2023-08-02
Date Accepted:
Online publication date: 2023-10-31