Zhou, Yan
Luo, Haimei
Chen, Gaopan
Luo, Guihai
Pan, Liyan
Pan, Guoshun https://orcid.org/0000-0002-6776-2531
Funding for this research was provided by:
Shenzhen Basic Research Program (No. 2021Szvup095)
Article Title: Photocatalysis-Assisted Chemical Mechanical Polishing of SiC Wafer using a Novel SiO2@TiO2 Core-Shell Composite Nanoparticles Slurry
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2023 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited
Publication dates
Date Received: 2023-08-02
Date Accepted:
Online publication date: 2023-10-31