Yamaguchi, Jun https://orcid.org/0000-0003-3321-8666
Sato, Noboru
Tsukune, Atsuhiro
Momose, Takeshi
Shimogaki, Yukihiro
Article Title: Atomic Layer Deposition of Cobalt Film from Dicobalt-hexacarbonyl-tert-butylacetylene and Hydrogen
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
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Publication dates
Date Received: 2023-07-28
Date Accepted:
Online publication date: 2023-11-15