Kaloyeros, Alain E. https://orcid.org/0000-0002-6872-1707
Arkles, Barry https://orcid.org/0000-0003-4580-2579
Article Title: Review—Silicon Carbide Thin Film Technologies: Recent Advances in Processing, Properties, and Applications: Part II. PVD and Alternative (Non-PVD and Non-CVD) Deposition Techniques
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2024 The Author(s). Published on behalf of The Electrochemical Society by IOP Publishing Limited
Publication dates
Date Received: 2023-10-10
Date Accepted:
Online publication date: 2024-04-03