Funding for this research was provided by:
Jiangsu Province Higher Education Basic Science (Natural Science) Research General Project (23KJB460029)
The Scientific Research Start-up Foundation for High-level Talents of Taizhou University (TZXY2022QDJJ005)
The Science and Technology Support (Social Development) Project of Taizhou City (TS202328)
Article Title: Analysis of Wet-Etched Structures on R-Plane Substrates of Sapphire in the Etchant of Sulfuric Acid and Phosphoric Acid
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2024 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2024-02-06
Date Accepted:
Online publication date: 2024-04-09