Park, Kihong
Jeon, Wookyung
Liu, Pengzhan
Jeon, Sanghuck
Hong, Seokjun
Park, Sanghyeon
Kim, Taesung https://orcid.org/0000-0001-6280-7668
Article Title: Effects of Gas-Dissolved Water for Ceria Nanoparticles on the SiO2 Film Surface in Post-CMP Cleaning
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2024 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2024-02-02
Date Accepted:
Online publication date: 2024-05-21