Sadri Mofakham, Atefeh https://orcid.org/0009-0008-7360-1874
Kim, Hyoungjae https://orcid.org/0000-0003-2121-2726
Cho, Hanchul
Lee, Kangchun https://orcid.org/0000-0001-6021-2812
Ahmadi, Goodarz https://orcid.org/0000-0001-5277-7960
Seo, Jihoon https://orcid.org/0000-0003-3946-6476
Article Title: Enhancing CMP Performance of Micro-Structured Pad Patterns: CFD Simulations and Experimental Evaluations
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2024 The Author(s). Published on behalf of The Electrochemical Society by IOP Publishing Limited
Publication dates
Date Received: 2024-06-02
Date Accepted:
Online publication date: 2024-11-22