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Funding for this research was provided by:
Fonds Wetenschappelijk Onderzoek / Japanese Society for the Promotion of Science (VS01522N)
H2020 Industrial Leadership (101007254)
HORIZON EUROPE Digital, Industry and Space (101096772)
HORIZON EUROPE Chips Joint Untertaking (101183277)
Article Title: Epitaxial Si/SiGe Multi-Stacks: From Stacked Nano-Sheet to Fork-Sheet and CFET Devices
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2025 The Author(s). Published on behalf of The Electrochemical Society by IOP Publishing Limited
Publication dates
Date Received: 2024-10-23
Date Accepted:
Online publication date: 2025-01-20