Funding for this research was provided by:
the National Natural Science Foundation of Hebei province (F2024202041)
Science and Technology Cooperation Special Project of Shijiazhuang (SJZZXB23003)
the Funding Project for Cultivating Innovative Capabilities of Doctoral Students in Hebei Province (CXZZBS2024039)
the Youth Foundation of National Natural Science Foundation of China (62003123)
the Major National Natural and Technology Special Projects (2016ZX02301003–004-007)
Article Title: The Study on Action Mechanism of 2-Phosphonobutane -1,2,4-Tricarboxylic Acid in Cu Chemical Mechanical Planarization Process
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2025 The Author(s). Published on behalf of The Electrochemical Society by IOP Publishing Limited
Publication dates
Date Received: 2024-07-13
Date Accepted:
Online publication date: 2025-04-04