Han, Kwang-Min https://orcid.org/0000-0001-5653-3197
Kumar, Sumit https://orcid.org/0000-0001-5173-2074
Khan, Mir Jalal
Lee, Jae-Hyeong https://orcid.org/0009-0008-1797-5169
Kim, Tae-Gon
Park, Jin-Goo https://orcid.org/0000-0002-8008-6478
Article Title: Combined Effects of PVA Brush Scrubbing Parameters and Processes on Post-CMP Cross-Contamination
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2025 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2024-12-18
Date Accepted:
Online publication date: 2025-04-29