Seki, Ryuichi https://orcid.org/0009-0006-9274-2758
Tabe, Hirofumi https://orcid.org/0000-0002-5864-5931
Fujiwara, Naozumi https://orcid.org/0009-0005-7570-1893
Sato, Masanobu
Orisaka, Masayuki
Takayanagi, Masayoshi https://orcid.org/0000-0002-2458-0180
Article Title: Adhesion and Elastic Energy Analysis of Pattern Collapse in Surface-Modified FinFET Structures
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2025 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2025-01-16
Date Accepted:
Online publication date: 2025-05-12