Morsada, Zinnat
Gunasekaran, Harini Bhuvaneswari
Visaveliya, Nikunjkumar R.
A. Shipp, Devon https://orcid.org/0000-0002-8709-1667
Funding for this research was provided by:
ChEmpower Corp.
Article Title: Innovations in Polyurethane Pads Used in Chemical-Mechanical Planarization: A Perspective and Future Directions
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2025 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2024-10-14
Date Accepted:
Online publication date: 2025-05-23