Zhang, Peiwei
Zhang, Wei
Wu, Yuan
Wang, Xu
Li, Xin
Jin, Siqingaowa
Zhang, Dongliang
Zhao, Yan
Zhou, Wei
Wang, Mitang https://orcid.org/0000-0002-0387-5828
Funding for this research was provided by:
National Key R&D Program of China (2023YFB3507100)
Science and Technology Major Project Inner Mongolia Autonomous Region in China (2019ZD023)
Article Title: Preparation of Chlorine-doped CeO2 Abrasive and Investigation of Chemical-Mechanical Polishing Properties
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2025 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2025-02-08
Date Accepted:
Online publication date: 2025-05-21