Uzuhashi, Jun https://orcid.org/0000-0003-2023-8158
Irokawa, Yoshihiro https://orcid.org/0000-0002-6531-4356
Nabatame, Toshihide
Ohkubo, Tadakatsu
Koide, Yasuo
Funding for this research was provided by:
Ministry of Education, Culture, Sports, Science and Technology, Japan (JPJ009777)
JSPS KAKENHI (23K03949)
Article Title: Observation of Atomic-Scale Structural Changes in Al2O3/GaN Interfacial Layers Prepared with a Dummy-SiO2 Process
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2025 The Author(s). Published on behalf of The Electrochemical Society by IOP Publishing Limited
Publication dates
Date Received: 2025-07-02
Date Accepted: 2025-07-24
Online publication date: 2025-08-05