Bhonsle, Rithu
Krishnan, Sitaraman https://orcid.org/0000-0002-1228-8393
Funding for this research was provided by:
BASF
St. Lawrence Nanotechnology Inc.
Article Title: Time Series Analysis of Friction and Pad-Substrate Interactions in Chemical Mechanical Planarization
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2025 The Author(s). Published on behalf of The Electrochemical Society by IOP Publishing Limited
Publication dates
Date Received: 2025-07-10
Date Accepted: 2025-10-07
Online publication date: 2025-10-17