Takigawa, Ryo http://orcid.org/0000-0002-6846-2151
Matsumae, Takashi http://orcid.org/0000-0001-5767-8398
Yamamoto, Michitaka
Higurashi, Eiji
Asano, Tanemasa
Kanaya, Haruichi
Funding for this research was provided by:
JSPS KAKENHI (JP17H04925)
Journal title: ECS Journal of Solid State Science and Technology
Article type: paper
Article title: Demonstration of GaN/LiNbO3 Hybrid Wafer Using Room-Temperature Surface Activated Bonding
Copyright information: © 2020 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited
Publication dates
Date received: 2019-10-30
Date accepted: 2020-03-24
Online publication date: 2020-04-23