Funding for this research was provided by:
National Natural Science Foundation of China (51205226, 91323302)
Science Fund for Creative Research Groups (51321092)
Journal title: ECS Journal of Solid State Science and Technology
Article type: error
Article title: Erratum: Galvanic corrosion inhibitors for Cu/Ru couple during chemical mechanical polishing of Ru [ ECS J. Solid-State Sci. Technol., 7, P62 (2017)]
Copyright information: © 2020 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited
Publication dates
Date received: 2020-04-30
Online publication date: 2020-05-11