Lu, Yanan
Niu, Xinhuan http://orcid.org/0000-0002-3046-0046
Yang, Chenghui
Huo, Zhaoqing
Cui, Yaqi
Zhou, Jiakai
Wang, Zhi http://orcid.org/0000-0001-6087-8972
Funding for this research was provided by:
Natural Science Foundation of Tianjin China (16JCYBJC16100)
the Key Laboratory of Electronic Materials and Devices of Tianjin, China
the Major National Science and Technology Special Projects (No. 2016ZX02301003-004-007)
Article Title: Effect of Potassium Persulfate as an Additive On Chemical Mechanical Polishing Performance on C-, A- and R-Plane Sapphire
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2020 The Author(s). Published on behalf of The Electrochemical Society by IOP Publishing Limited
Publication dates
Date Received: 2020-05-13
Date Accepted:
Online publication date: 2020-07-14