Kaloyeros, Alain E. http://orcid.org/0000-0002-6872-1707
Pan, Youlin
Goff, Jonathan http://orcid.org/0000-0002-4794-1356
Arkles, Barry http://orcid.org/0000-0003-4580-2579
Article Title: Review—Silicon Nitride and Silicon Nitride-Rich Thin Film Technologies: State-of-the-Art Processing Technologies, Properties, and Applications
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2020 The Author(s). Published on behalf of The Electrochemical Society by IOP Publishing Limited
Publication dates
Date Received: 2020-05-19
Date Accepted:
Online publication date: 2020-08-07