Sano, Yasuhisa http://orcid.org/0000-0002-1767-922X
Tajiri, Koki
Inoue, Yuki
Mukai, Risa
Nakanishi, Yuma
Matsuyama, Satoshi
Yamauchi, Kazuto
Article Title: High-Speed Etching of Silicon Carbide Wafer Using High-Pressure SF6 Plasma
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2021 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited
Publication dates
Date Received: 2020-10-04
Date Accepted:
Online publication date: 2021-01-25